Table 1.
Measurement Sensitivity | <20 nm |
---|---|
Dynamic measurement boundary | 100 µm |
Measurement boundary | >100 µm |
Greatest measurement area | 1 m diameter |
Distance to the object | >¼ m |
Data registration frequency | 30 Hz |
Measurement Sensitivity | <20 nm |
---|---|
Dynamic measurement boundary | 100 µm |
Measurement boundary | >100 µm |
Greatest measurement area | 1 m diameter |
Distance to the object | >¼ m |
Data registration frequency | 30 Hz |