Table 1.

Parameters of TSM resonator [18].

Density of quartz	ρq	2.651 × 103 kg m−3
Shear stiffness of quartz	$c_{\mathrm{q}}=c_{66}+\frac{e_{26}^2}{{\epsilon }_{22}}+j\omega {\eta }_{\mathrm{q}}$	2.970 × 1010 N m−2 + jωηq
Piezoelectric constant of quartz	eq = e26	9.657 × 10−2 A s m−2
Dielectric permittivity of quartz	εq = ε22	3.982 × 10−11 A2 s4 kg−1 m−3
Surface area of TSM resonator	A	2.047 × 10−5 m2
Thickness of TSM resonator	hq (theoretical)	165 μm