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(a–c) Optical images (left) and FEA results of the distribution of maximum principal strain (right) of a representative device (a) in the undeformed state, (b) with 20% uniaxial stretching in the horizontal direction, and (c) with 15% biaxial stretching. The insets show magnified views of the fractal electrode. (d) FEA results of the stress-strain relation of the elastomer membrane and the 3D-MIM.
