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. Author manuscript; available in PMC: 2015 Aug 7.
Published in final edited form as: IEEE Trans Ultrason Ferroelectr Freq Control. 2015 Jul;62(7):1342–1355. doi: 10.1109/TUFFC.2015.007016

Table 3.

Number percentage of debris particles

Debris Diameter(μm) 2–10 10–30 30–60 60–100 100–300 >300
SI 0.3mm, P(−)LS 30MPa 99.89% 0.11% <0.001% <0.0001% <0.0001% None
SI 0.3mm, P(−)LS 36MPa 99.96% 0.04% <0.001% <0.0001% <0.0001% None