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. 2015 Jun 25;15(7):14932–14945. doi: 10.3390/s150714932

Figure 7.

Figure 7

(a) Single Micro-Electro-Mechanical Sensor (MEMS) microphone; (b) schematic diagram of MEMS microphone; (c) frequency response curve for the audio range; and (d) frequency response curve for ultrasound of the used MEMS microphone. Reproduced with permission from [25].