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. 2015 Aug 24;5:13375. doi: 10.1038/srep13375

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This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

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In each image, the pneumatic pressure is applied from the top and the hydraulic pressure is applied from the left. The thickness of the PDMS thin film of the valve mechanism is 100 μm, and the deformation occurs at the intersection shown in the images.