Table 10.
Interferometer pixel-to-pixel spacing requirementsa
Magnification, × | Pixel-to-pixel spacing, μm |
---|---|
5 | < 1.57 |
10 | < 0.83 |
20 | < 0.39 |
40 | < 0.21 |
80 | < 0.11 |
This table does not include magnifications at or less than 2.5 × for optical interferometry because the pixel-to-pixel spacings will be too large for this work and the possible introduction of a second set of interferometric fringes in the data set at these magnifications can adversely affect the data. Therefore, magnifications at or less than 2.5 × shall not be used with optical interferometry.