Table 3.

Sample Young’s modulus uncertainty values (assuming E_init = 70 GPa)

uncertainty		Type A or Type B	value (in GPa)
uthick	(using t = 2.743 μm and σthick = 0.058 μm)	Type B	2.8
uρ	(using ρ = 2.2 g / cm3 and σρ = 0.05 g/cm3)	Type B	1.5
uL	(using Lcan = 300 μm and σL = 0.2 μm)	Type B	0.17
ufreq	(using fmeas1 = 26.82625 kHz, fmeas2 = 26.8351 kHz, and fmeas3 = 26.8251 kHz)	Type B	0.027
ufresol	(using fresol = 1.25 Hz)	Type B	0.0018
udamp	(using Wcan = 28 μm and σW = 0.1 μm and using μ = 1.84 × 10−5 Ns / m2 and σμ = 0.01 × 10−5 Ns / m2)	Type B	0.0004
ucE	$=\sqrt{u_{\text{thick}}^2+u_{\rho }^2+u_L^2+u_{\text{freq}}^2+u_{\text{fresol}}^2+u_{\text{damp}}^2}$		3.2
$3u_{cE}{}^{\mathrm{a}}$			9.5

^aThis 3u_cE uncertainty is plotted in Fig. 6 with the repeatability data point corresponding to the first cantilever with length of 300 μm.