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Summary of the geometric parameters of the different samples
| SP height [μm] | LP height [μm] | Δ Height [%] | SP tip Ø [μm] | LP tip Ø [μm] | Δ Tip Ø [%] | |
|---|---|---|---|---|---|---|
| AR 4.0 | 1590 | 1700 | 6.9 | 570 | 630 | 10.5 |
| AR 4.5 | 1800 | 1880 | 4.4 | 620 | 680 | 9.7 |
| AR 5.0 | 1980 | 2100 | 6.1 | 640 | 680 | 6.3 |
