Table 10.
NIST DTSA-II SDD-EDS analysis of WSi2 at E 0 = 10 keV; Si and W as references and standards; 12 replicates
| Parameter | Raw analytical total (mass concentration) | Si (atomic conc.) | W (atomic conc.) |
|---|---|---|---|
| Mean | 0.9801 | 0.6615 | 0.3385 |
| Relative error (%) | −0.78 | 1.55 | |
| σ | 0.0057 | 0.0011 | 0.0011 |
| σ relative (%) | 0.58 | 0.17 | 0.33 |
| Si (mass conc.) | W (mass conc.) | ||
|---|---|---|---|
| Single analysis | 0.9894 | 0.2262 | 0.7632 |
| Relative error (%) | −3.4 | −0.36 | |
| k error (%) | 0.0002, 0.088 | 0.0005, 0.066 | |
| A-factor error (%) | 0.0002, 0.088 | 0.0047, 0.62 | |
| Z-factor error (%) | 6.6E−6, 0.0029 | 0.0002, 0.026 | |
| Combined errors (%) | 0.00028, 0.13 | 0.0047, 0.62 |