Table 14.

SEM/SDD-EDS analysis of metal nitrides (results in atom fractions)

Nitride	N ideal	N mean	Relative error (%)	σ	Relative σ (%)	Metal ideal	Metal mean	Relative error (%)	σ	Relative σ (%)
TiN	0.5000	0.5098	2.0	0.00156	0.3	0.5000	0.4902	−2.0	0.00156	0.32
VN	0.3000	0.2961	−1.3	0.0098	3.3	0.7000	0.7039	0.57	0.0098	1.4
Cr2N	0.3333	0.3501	5.1	0.006	1.7	0.6667	0.6499	−2.5	0.006	0.93
Fe3N	0.2500	0.2573	2.9	0.00688	2.7	0.7500	0.7427	−1.0	0.00688	0.90