Table 7.

NIST DTSA-II SDD-EDS analysis of MoS₂ at E ₀ = 10 keV; 7 replicates

Parameter	Raw analytical total (mass concentration)	S (atomic concentration) Ideal = 0.6667	Mo (atomic concentration) Ideal = 0.3333
Mean	1.0037	0.6646	0.3354
Relative error (%)		−0.32	0.63
σ	0.0131	0.00222	0.00222
σ relative (%)	1.3	0.33	0.66

		S (mass concentration) Ideal = 0.4006	Mo (mass concentration) Ideal = 0.5994
Single analysis	1.0010	0.3971	0.6039
Relative error (%)		−0.87	0.75
k error unknown		0.0005	0.0003
k error standard		0.0003	0.0014
A-factor error		0.0006	0.0007
Z-factor error		0.000028	0.000045
Combined errors		0.0008	0.0016