U11	U22	U33	U12	U13	U23
Cl1	0.0180 (6)	0.0357 (8)	0.0445 (8)	−0.0025 (6)	−0.0009 (8)	−0.0003 (8)
O1	0.023 (2)	0.030 (3)	0.064 (3)	−0.001 (2)	−0.001 (2)	−0.002 (2)
O2	0.021 (2)	0.035 (3)	0.061 (3)	−0.0019 (19)	−0.004 (2)	0.001 (2)
O3	0.034 (3)	0.028 (3)	0.072 (3)	−0.002 (2)	0.003 (2)	0.012 (2)
N1	0.017 (2)	0.028 (3)	0.032 (3)	−0.002 (2)	−0.002 (2)	0.000 (2)
N2	0.017 (3)	0.032 (3)	0.041 (3)	−0.002 (2)	0.006 (2)	−0.001 (2)
C3	0.018 (3)	0.028 (3)	0.028 (3)	−0.001 (2)	0.005 (3)	−0.002 (3)
C2	0.018 (3)	0.030 (3)	0.031 (3)	0.001 (3)	0.004 (2)	0.003 (2)
C1	0.019 (3)	0.031 (4)	0.028 (3)	0.000 (3)	0.005 (2)	0.003 (2)
C6	0.023 (3)	0.028 (4)	0.048 (4)	−0.001 (3)	0.002 (3)	−0.001 (3)
C5	0.024 (3)	0.033 (4)	0.053 (4)	0.007 (2)	0.000 (4)	0.009 (4)
C4	0.022 (3)	0.039 (4)	0.039 (3)	0.007 (3)	0.005 (3)	0.005 (3)
C7	0.022 (3)	0.027 (3)	0.027 (3)	−0.002 (3)	0.001 (2)	0.003 (3)
C8	0.016 (3)	0.031 (4)	0.025 (3)	0.001 (3)	0.001 (2)	0.000 (3)
C9	0.015 (3)	0.029 (3)	0.032 (3)	−0.004 (2)	0.003 (2)	−0.001 (3)
C10	0.023 (3)	0.029 (4)	0.040 (4)	0.001 (3)	0.005 (3)	0.003 (3)
C11	0.018 (3)	0.043 (4)	0.041 (4)	−0.002 (3)	0.003 (3)	−0.002 (3)
C12	0.017 (3)	0.042 (4)	0.040 (4)	−0.004 (3)	0.005 (3)	−0.004 (3)
C13	0.022 (3)	0.028 (3)	0.038 (3)	0.002 (3)	0.005 (3)	0.002 (3)