Table 1.
State-of-art pressure sensors for high temperature applications.
| Characteristics | Si-Bulk Piezoresistive Non-Compensated | Filled Sensors Available | SiC-Based (not on Market) [4] | SOI-Based (not on Market) [5] | Unit |
|---|---|---|---|---|---|
| typical value | |||||
| Offset | ±7 | ±7 | na * | ±10 | mV |
| Span voltage (FSO) | 170 | 170 | 18–66 | 120 | mV |
| Sensitivity | 8.7 (µV/V kPa) | depends on steel membrane | 0.013 (mV/V/psi) | 0.29–0.42 (mV/psi) | |
| TCO | 0.01 | 0.01 | −0.18 | 0.01 | %FSO |
| TCS | 0.1 | 0.1 | 0.24 | 0.1 | %FSO |
| Linearity | 0.35 | 0.35 | 1 | 0.1–0.5 non compensated | %FSO |
| Pressure hystresis | <0.1 | <0.2 | 0.7 | 0.1 | %FSO |
| Temperature range | <250 | Oil—300, Mercury—400, NaK—500 | 600 | 300 | °C |
| Size | 2 × 2 × 0.5 | Diameter 7 mm, height 10 mm | na * | aa * | mm3 |
(* not available).