U11	U22	U33	U12	U13	U23
S1	0.0590 (5)	0.0291 (4)	0.0373 (4)	0.0030 (4)	0.0125 (4)	0.0021 (4)
S2	0.0684 (6)	0.0435 (5)	0.0469 (5)	0.0125 (4)	0.0112 (5)	−0.0040 (4)
O3	0.0532 (14)	0.0428 (13)	0.0256 (12)	0.0032 (10)	0.0063 (10)	0.0005 (9)
O4	0.0800 (17)	0.0586 (16)	0.0356 (14)	0.0054 (14)	0.0226 (13)	−0.0038 (11)
N5	0.0614 (18)	0.0287 (13)	0.0591 (19)	0.0034 (12)	0.0108 (16)	−0.0015 (12)
C6	0.055 (2)	0.0355 (17)	0.034 (2)	−0.0090 (16)	0.0097 (17)	−0.0066 (14)
C7	0.0457 (19)	0.0311 (16)	0.0370 (19)	−0.0016 (14)	0.0064 (16)	0.0018 (13)
C8	0.0378 (17)	0.0284 (15)	0.0311 (17)	−0.0092 (13)	0.0014 (14)	0.0009 (12)
C9	0.0389 (17)	0.0287 (15)	0.0285 (18)	−0.0074 (13)	0.0054 (14)	0.0013 (12)
C10	0.0429 (17)	0.0304 (15)	0.0262 (16)	−0.0078 (13)	0.0048 (14)	−0.0022 (12)
C11	0.0458 (19)	0.0343 (16)	0.0319 (18)	−0.0061 (15)	−0.0001 (15)	0.0054 (13)
C12	0.0410 (17)	0.0295 (16)	0.0407 (19)	−0.0082 (13)	0.0063 (15)	0.0018 (14)
C13	0.0464 (19)	0.0342 (16)	0.038 (2)	−0.0052 (15)	0.0136 (16)	−0.0059 (13)
C14	0.049 (2)	0.0407 (19)	0.063 (2)	0.0030 (16)	0.0030 (19)	0.0030 (16)
C15	0.0479 (18)	0.0354 (16)	0.0266 (16)	−0.0073 (15)	0.0026 (15)	0.0009 (13)
C16	0.0450 (19)	0.0350 (16)	0.0338 (18)	−0.0026 (14)	0.0008 (15)	−0.0004 (14)
C17	0.0439 (18)	0.0316 (16)	0.0377 (19)	0.0058 (14)	−0.0067 (15)	−0.0004 (13)
C18	0.061 (2)	0.040 (2)	0.068 (3)	0.0003 (17)	0.014 (2)	0.0126 (17)
C19	0.082 (3)	0.055 (2)	0.064 (3)	−0.003 (2)	−0.001 (2)	0.0077 (19)
C20	0.085 (3)	0.048 (2)	0.090 (4)	−0.011 (2)	−0.035 (3)	0.024 (2)
C21	0.073 (3)	0.038 (2)	0.109 (4)	−0.001 (2)	−0.026 (3)	−0.002 (2)
C22	0.075 (3)	0.0324 (18)	0.081 (3)	−0.0030 (18)	0.003 (2)	−0.0062 (18)