Table 1.
Concave microwell | Type 1 | Type 2 | |
---|---|---|---|
| |||
Fabrication condition | Laser power (W) | ~0.9 (duty cycle 3%) | ~4.8 (duty cycle 16%) |
Pulse duration time (ms) | 30 | 30 | |
| |||
Characterization | Depth t (μm) | 1–4 | 8–13 |
Diameter d (μm) | 30–40 | 85–105 | |
Minimum radius R (μm) | 80–200 | 250–400 | |
| |||
Microwell arrays | 4×4 Square arrays with a period of 3 mm | ||
| |||
Dielectric coating | Central wavelength (nm) | 570 | 600 |
| |||
Reflectivity | ≥99.5% | ≥99.9% |