Table 1.
Name | Feature description | Pattern type | Feature width | Depth |
---|---|---|---|---|
05Grat | ridge/groove | linear | 0.5 μm | 0.75 μm |
075Grat | ridge/groove | linear | 0.75 μm | 0.75 μm |
10Grat | ridge/groove | linear | 1.0 μm | 0.75 μm |
10Post | post | radial | 1.0 μm | 0.75 μm |
Control | flat surface | none | — | — |