Figure 13.

(a) Steady state concentrations of physisorbed and chemisorbed adsorbates versus pressure, calculated for the case of zero electron flux, and substrate temperatures of 200, 300 and 350 K. (b) Time-dependence of N_p and N_c calculated for a substrate temperature of 300 K and a precursor gas pressure of 1 Torr. (In all cases, gas temperature = 300 K; E_p = 510 meV, E_conv = 1.415 eV, E_c = 855 meV; f = 0; A_p = 2A_c and n_c = 2 to represent a dissociative chemisorption process in which the precursor molecule fragments into two chemisorbed molecules. All other model input parameters were the same as in [5].)