Skip to main content
. 2015 Sep 25;6:8407. doi: 10.1038/ncomms9407

Figure 1. Structure of grapheme-based and Pt-based RRAM in a vertical 3D cross-point architecture.

Figure 1

(a) An illustration of graphene-based RRAM in a vertical cross-point architecture. The RRAM cells are formed at the intersections of the TiN pillar electrode and the graphene plane electrode. The resistive switching HfOx layer surrounds the TiN pillar electrode and is also in contact with the graphene plane electrode. (b) A schematic cross-section of the graphene-based RRAM. (c) High-resolution TEM image (details in Methods section) of the two-stack GS-RRAM structure. The RRAM memory elements are highlighted in red. Scale bar, 40 nm. (d,e) First and second layer of GS-RRAM with graphene on top of the Al2O3 layer. Scale bars, 5 nm. (f,g) TEM image of the two-stack Pt-based RRAM from previous work14,15. Scale bars, 40 nm (f) and 5 nm (g).