TABLE II.
Step limit (μm) | KER(keV)a | Sel(keV μm−1)b | (keV μm−1)c | First edge (keV μm−1) | Second peak (keV μm−1) |
---|---|---|---|---|---|
1 | 50 | 77.4 | 50 | NA | NA |
5 | 320 | 53.2 | 64 | NA | 63 |
10 | 550 | 38.9 | 55 | 55 | 63 |
50 | 1560 | 19.0 | 31.2 | 31 | 63 |
100 | 2400 | 13.9 | 24 | 24 | 63 |
500 | 6000 | 6.85 | 12 | 23 | 63 |
KER stands for the kinetic energy of protons with a residual range equal to the step limit set in the simulation.
The electronic stopping power, Sel, was calculated using the pstar program (Ref. 40) for the kinetic energy of protons, KER.
is the quotient of KER and step limit set in the simulation.