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. 2015 Oct 8;42(11):6234–6247. doi: 10.1118/1.4932217

TABLE V.

The LETd-to-LETt ratios and transition depths to switch LETt and LETd.

Step limit (μm) LETd/LETt Transition depth (cm)
1 1.57 4.7
5 1.22 4.6
10 1.15 4.55
50 1.07 4.2
100 1.05 4.2
500 1.03 0 (entrance plane)
Deterministic 1.0 0 (entrance plane)