TABLE V.
The LETd-to-LETt ratios and transition depths to switch LETt and LETd.
| Step limit (μm) | LETd/LETt | Transition depth (cm) |
|---|---|---|
| 1 | 1.57 | 4.7 |
| 5 | 1.22 | 4.6 |
| 10 | 1.15 | 4.55 |
| 50 | 1.07 | 4.2 |
| 100 | 1.05 | 4.2 |
| 500 | 1.03 | 0 (entrance plane) |
| Deterministic | 1.0 | 0 (entrance plane) |