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. 2015 Oct 4;2015:328943. doi: 10.1155/2015/328943

Table 1.

Parameters for deposition of TiO2 coatings.

Deposition parameter 60 A 0 V 90 A 50 V
Target Ti
Working pressure (Pa) 0.5
Deposition time (min) 20
Target voltage (V) 20
Target current (A) 60 90
Substrate bias (−V) 0 50
Crystal structure of TiO2 coating A-TiO2 R-TiO2