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. 2015 Sep 22;15(9):24318–24342. doi: 10.3390/s150924318

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© 2015 by the authors; licensee MDPI, Basel, Switzerland.

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/4.0/).

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Gas cell photo. The micro-cantilever beam is mounted on the cantilever chip, which is mounted on the PCB. In addition, the magnet, the pressure, the temperature and the humidity sensors are displayed.