Skip to main content
. 2015 Sep 8;15(9):22692–22704. doi: 10.3390/s150922692

Figure 1.

Figure 1

Three structures designed to demonstrate the stress concentration effect: (a) The structure with a crossed silicon beam and aluminum beam (No. 1); (b) The flat membrane structure (No. 2); (c) The structure with aluminum beam but no silicon beam (No. 3).