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Sensor fabrication SEM images. (a) strain gauge array and (b) single strain gauge, (c) array of devices showing gold pads/SiO2/strain gauge, (d) magnified image of single device, (e) array of gold coated SU-8 pillars/gold pads/SiO2/strain gauges and (f) magnified images of SU-8 pillars on gold pads (inset shows gold coated SU-8 pillars on gold pads).
