Figure 2. High-quality factors of the microwave cavity and mechanical resonator.
(a) Reflection coefficient measurement of the cavity. The loaded quality factor is QL=1.1 × 105, corresponding to a total decay rate κ=2π × 45.5 kHz. Internal dissipation rate is κ0=2π × 23.9 kHz, with internal quality factor Q0=2 × 105. (b) Power spectral density of the thermomechanical motion of the fundamental mode of the membrane ωm≈2π × 123 kHz with linewdith γm≈2π × 3.5 mHz, corresponding to Qm=3.5 × 107. Red: data; Grey: fit.