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. 2015 Oct 9;6:8491. doi: 10.1038/ncomms9491

Figure 2. High-quality factors of the microwave cavity and mechanical resonator.

Figure 2

(a) Reflection coefficient Inline graphic measurement of the cavity. The loaded quality factor is QL=1.1 × 105, corresponding to a total decay rate κ=2π × 45.5 kHz. Internal dissipation rate is κ0=2π × 23.9 kHz, with internal quality factor Q0=2 × 105. (b) Power spectral density of the thermomechanical motion of the fundamental mode of the membrane ωm≈2π × 123 kHz with linewdith γm≈2π × 3.5 mHz, corresponding to Qm=3.5 × 107. Red: data; Grey: fit.