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Summary of the capacitance values derived from the experiments and derived by analytical and numerical analyses.
| IDE Geometry | Results | |||||
|---|---|---|---|---|---|---|
| Experimental | Analytical (Equation (1)) | FEM Model | ||||
| w (μm) | s (μm) | t (nm) | Cexp (pF) | Canal (pF) | Cideal (pF) | CAFM (pF) |
| 5 | 5 | 110 | - | 50.09 | 50.07 | - |
| 6 | 4 | 110 | 66.1 | 57.98 | 57.91 | 60.05 |
| 6 | 4 | 220 | - | 58.95 | 58.57 | - |
w: finger width; s: finger interspacing; t: finger thickness; Cideal: geometry as given in Figure 5; CAFM: IDE geometry based on AFM data.
