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. 2015 Oct 16;15(10):26478–26566. doi: 10.3390/s151026478

Figure 11.

Figure 11

Frequency tuning principle of a fishbone resonator with five exciting electrodes reported by Suzuki et al. [129]. (a) SEM of a fishbone micromechanical resonator with five exciting electrodes; (b) Configurations of the exciting electrodes; (c) main beam deformations corresponding to each exciting electrode configuration. Reused with permission from [129].