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. 2015 Oct 16;15(10):26478–26566. doi: 10.3390/s151026478
Adc static deflection amplitude Kf spring constant
Ae elastic hardening tuning coefficient KC capacitance expansion coefficient
At cross-sectional area k1 is the linear spring stiffness
B applied magnetic field kp spring constant
Bc capacitive softening coefficient Ke effective thermal conductivity
ch heat transfer coefficient Kt torsional spring constant
cp weighted average of heat capacity Lb equivalent length of the bar
cpl specific heat of the molten film Lm length of the beam
ct weighted average of thermal conductivity meff effective mass
cu field gradient constant mf resonator mass
C capacitance per unit area mPt added Pt mass
Cf damping n electrostatic dimension parameter
Cg capacitance p nonlinearity of order
Cp specific heat conductivity Pe effective electrical heat production
C, C first and second derivative of capacitances Plaser incident optical power
d3j anisotropic piezoelectric coefficient P Joule heating rate
dt total thickness r vector in the plane
dw diameter of the cylindrical wire ro experimental optical spot size
E Young’s modulus RC resistance
Es laser fluence Rr reflectivity
Ev minimum laser fluence tp total device thickness
f0 fundamental resonant frequency T0 ambient temperature
fi initial measured frequency Td effective dielectric thickness
Fe external force Tf thermal axial load
Fmag Lorentz force Tm film melting temperature
f¯ average frequency Tv film boiling temperature
Gs modulus of elasticity in shear T derivative of temperature
H thickness V applied voltage
Hl latent heat Vdc dc voltage
I electrical current Vg applied voltages on the gate
Im maximum intensity Vtun tuning voltage
Ip polar moment of inertia of the area x displacement
It inertial of the paddle y deflection
k0 mechanical stiffness y0 initial air-gap
keff effective stiffness Zdc static displacement
ktotal total stiffness