Table 3.

Comparison of some graphene mechanical resonators reported during the past several years.

Year	Resonator Structure	Excitation Method	Resonant Frequency	Quality Factor
2007	Doubly clamped single layer graphene [151]	Electrostatic/optical excitation	70.5 MHz (room temperature)	78
2008	Fully clamped square graphene [150]	Optical excitation	66 MHz (room temperature)	25
2008	Doubly clamped multilayer graphene [152]	Electrostatic excitation	18–85 MHz	2–30
2008	Fully clamped drum graphene [153]	Optical excitation	10–110 MHz (room temperature)	1500–4000
2009	Doubly clamped single layer graphene [148]	Electrostatic excitation	From 30 to 130 MHz (room temperature)	~100 (room temperature), ~14,000 (at 5 K)
2009	Doubly clamped graphene [154]	Optical excitation	3–100 MHz	50–400
2010	Doubly clamped single layer graphene [145]	Optical/electrical excitation	From 5 to 75 MHz	~250 (room temperature), ~9000 (at 9 K)
2010	Doubly clamped single layer graphene [102]	Electrostatic excitation	34 MHz (at 77 K)	~10,000
2011	Doubly clamped single layer graphene [155]	Electrostatic excitation	~255 MHz	~100,000
2012	Doubly clamped few-layer graphene [156]	Thermal excitation	~8–23 MHZ	~7000
2013	Fully clamped graphene drum resonator [157]	Electrostatic excitation	48–260 MHz	~60
2014	Rectangular membrane graphene resonator [149]	Piezoelectric excitation	15.8–17 kHz	N/A