Table 4.

Overview of some suspended micro- and nanochannel resonators.

Resonator Type	Year	Dimensions of Resonator and Channel (Length × Width × Height)	Actuation/Sensing Method	Resonant Frequency	Quality Factor	Limit of Detection (Sensitivity)	Target/Application	Reference
Microchannel	2003	300μm × N/A × N/A	Electrostatic/optical	~42.7 kHz (air); 40.1 kHz (2-propanol); 39.6 kHz (water)	~90 (air)	${\text{10}}^{\text{-17}}{\text{g/μm}}^{\text{2}}$	Avidin and biotinylated bovine serum albumin	Burg et al. [30]
		N/A
	2006	300 × 33 × 7 μm	Electrostatic/optical	~33.5 kHz	~300–700 (vacuum); ~85 (air)	0.8 ng/cm2	Avidin and biotinylated bovine serum albumin	Burg et al. [170]
		200 × 33 × 7 μm
	2007	200 × 33 × 7 μm	Electrostatic/optical	220.5 kHz (air); 209.6 kHz (water)	15,000	0.7 ng/mL	Goat anti-mouse IgG molecules	Burg et al. [163]
		N/A × 8 × 3 μm
	2010	12 × 0.1 × 0.03 mm	N/A	~200 kHz	15,000	10 ng/mL	Activated leukocyte cell adhesion molecule (ALCAM)	von Muhlen et al. [171]
	2013	200 × 8 × 3 μm	Optical/optical	2–11,000 MHz	1.6E8	N/A	Water	Bahl et al. [172]
	2011	406 × 28.5 × 12 μm	Piezoresistive/optical	92.1 kHz	10,850	18.1 fg	Budding yeast cells	Lee et al. [173]
		N/A × 7.9 × 8 μm
	2013	200 × 20 × N/A μm	Piezoresistive/optical	~137.7 kHz	~15,000	16 Hz/kg/m3	very light solvents to very viscous and sticky crude oil samples	Khan et al. [167]
		N/A × 4 × 3 μm
	2014	60 × 36 × 7 μm	Feedback loop/optical	1.17 MHz	~23,000 (gas); ~6000 (liquid)	~30 fg	polystyrene nanoparticles	Modena et al. [169]
		N/A × 8 × 3 μm
	2013	300 × 30 × 30 μm	Thermal/optical	2.21 MHz (ambient atmosphere); 1.25 MHz (water)	190 (ambient atmosphere); 170 (water)	8.6 ppm/μW	Biological molecules and individual cells	Toda et al. [166]
Nanochannel	2010	20 μm × 650 nm~2.5 μm × 107 nm	Thermal/optical	~25 kHz	1300–7000 (before filling)	2 fg	Ethanol, H2O and D2O	Barton et al. [161]
	2010	50 × 10 × 1.3 μm	Electrostatic/optical	~630 kHz	~8000	27 ag	Ethanol, H2O and D2O	Lee et al. [174]
		N/A × 2 μm × 700 nm