Table 7.
Comparison of several actuation mechanisms applied for micro- and nanomechanical resonators.
Actuation Type | Fabrication Process | Power Consumption | Applied Voltage | Current | Nonlinear Effect |
---|---|---|---|---|---|
Electrothermal | Simple | High | Low | High | Medium |
Electrostatic | Simple | Low | High | Low | High |
Piezoelectric | Complex | Low | Medium | Low | High |
Magnetomotive | Simple | Medium | Low | Medium | High |
Dielectric | Medium | High | High | - | High |
Photothermal | Complex | Medium | - | - | High |