Skip to main content
. 2015 Oct 16;15(10):26478–26566. doi: 10.3390/s151026478

Table 7.

Comparison of several actuation mechanisms applied for micro- and nanomechanical resonators.

Actuation Type Fabrication Process Power Consumption Applied Voltage Current Nonlinear Effect
Electrothermal Simple High Low High Medium
Electrostatic Simple Low High Low High
Piezoelectric Complex Low Medium Low High
Magnetomotive Simple Medium Low Medium High
Dielectric Medium High High - High
Photothermal Complex Medium - - High