Table 9.
Comparison of some frequency tuning mechanisms and techniques for nanomechanical resonators. (Note: negative value denotes tuning downward).
| Authors | Type | Tuning Mechanism | Tuning Method | Resonant Frequency | Quality Factor | Tuning Range |
|---|---|---|---|---|---|---|
| Jun et al. [268] | bilayer beam resonator | Electrothermal tuning (Joule heating) | Active | 10.12 MHz | ~2000 | 10% |
| Jensen et al. [356] | Nanotube resonator | Changing the length | Active | ~300 MHz | >1000 | >100 MHz |
| Chen et al. [147] | Graphene resonator | Electrostatic tuning | Active | 52.19 MHz | ~55 | ~14% |
| Fardindoost et al. [383] | Nanofiber resonator | Electrostatic spring-softening effect | Active | 580 kHz | 2511 | −3 kHz |
| Kwon et al. [384] | Nanowire resonator | electrostatic spring-softening effect | Active | 1.564 MHz | N/A | 2.23% |
| Chang et al. [379] | Carbon-based nanoresonator | FIB-CVD machining | Passive | 2.467 MHz | 300 | −307.7 kHz |
| Tungsten-based nanoresonator | 1.352 MHz | 100 | −111.2 kHz | |||
| 853.2 kHz | 240.4 kHz | |||||
| Vick et al. [378] | Cantilever nanoresonator | Bulk FIB machining | Passive | 8.234 MHz | ~1623 | −7.5% |
| Rieger et al. [333] | Silicon nitride resonator | Dielectric actuation | Active | 6.5 MHz | 340,000 | ~5% |
| Fung et al [302] | Nanowire resonator | Electrostatic tuning | Active | 59.0 MHz | 2200 | 5 kHz |
| Ning. et al. [212] | Nanotube resonator | Residual tension effect | Active | 9.44 MHz | ~64.3 | 11.6 MHz |
| Verbridge et al. [125] | Nanostring resonator | Tensile stress effect | Active | 9.3 MHz | 105,000 | 15% |
| Stiller et al. [300] | CNTs resonator | Electrostatic softening effect | Active | 358.5 MHz | 11,800 | −75% |