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Parameters Used for Model Verification
| Parameter | Symbol | Value |
|---|---|---|
| Thickness of metal layer | t | 0.5 μm |
| Thickness of substrate | h2 | 1 mm |
| Relative dielectric constant of substrate | ε2 | 3.75 |
| Length of MUT zone | lMUT | 0.5 mm |
| Height of MUT zone | hl | 50 μm |
| Dimension of CPW | g/w/g | 7.2/6/7.2 μm |
| Dimension of GCPW | g/w/g | 7.2/6/7.2 μm |
| Dimension of microstrip line | w | 6 μm |
