Table 1. Beam conditions and stress response of Al-225, Al-400 and Au film during cyclic deformation.

Al-225	Cycle	Voltage (kV)	Area (μm2)	Current (nA)	Intensity (A/cm2)	σ1% (MPa)
	1	0	0	0	0	380
	2	80	12.5	44	0.352	358
	3	120	201	103	0.051	362
	4	200	201	61	0.03	408
	5	200	804	61	0.007	419
	6	120	804	103	0.012	445
Al-400	Cycle	Voltage (kV)	Area (μm2)	Current (nA)	Intensity (A/cm2)	σ0.75% (MPa)
	1	0	0	0	0	120
	2	120	201	14	0.0069	109
	3	200	201	10	0.0049	167
Au	Cycle	Voltage (kV)	Area (μm2)	Current (nA)	Intensity (A/cm2)	σ1% (MPa)
	1	0	0	0	0	443
	2	120	7	95	1.357	395
	3	200	7	95	1.357	464