Fig. 5.

Imaging of Groups 8 and 9 elements in a USAF target. (a) Resolution target design pattern. (b) A raw image, corresponding to the laser illumination at normal incident angle. (c) Imaging of the same field-of-view with LED Köhler illumination. (d) Reconstructed image obtained by using the DMD-based FPM. (e) Intensity profiles of the lines shown in blue (Element 4, Group 8) in Figs. 5(a), 5(c) and 5(d). The intensity profile of the image with Köhler illumination is relatively flat, while the profile of the reconstructed image obtained by using the DMD-based FPM system shows obvious peaks and valleys, which demonstrates that the proposed FPM system has the lateral resolution of 2.76 μm.