Fig. 2.

Optical design. (A) Position of optical components of the microscope. Mirror on the X, Y, Z, and rotation axes (MX, MY, MZ, MR1), additional mirrors on microscope head (MR2 and MR3), galvanometric scanner (SCAN), scan lens (SL), tube lenses (TL1 and TL2), dichroic beam splitter (DBS3), camera path mirror (CPM), detection system (DS), and objective (OBJ) (B) optical path of the scan optics and detection path (inset). Labels as in (A), but only X scan mirror of galvo scanners (SCAN) is shown, as well as dichroic beam-splitters (DBS1 and DBS2), condenser lens (CL), dichroic beam-splitter for emission (DBS2), dichroic beam-splitter for camera path (DBS3), and photo multiplier modules (PMM1 and PMM2).