Table 1.
Case # | Vibration power (W) | Free fall height (cm) | Film thickness (μm) | Film roughness (μm) |
---|---|---|---|---|
1 | 0 | 2 | 18.2 | 8.98 |
2 | 0 | 10 | 10.3 | 5.35 |
3 | 5 | 2 | 2.93 | 2.09 |
4 | 5 | 10 | 2.41 | 1.86 |
5 | 20 | 2 | 1.80 | 0.90 |
6 | 20 | 10 | 2.00 | 0.86 |
Case # | Vibration power (W) | Free fall height (cm) | Film thickness (μm) | Film roughness (μm) |
---|---|---|---|---|
1 | 0 | 2 | 18.2 | 8.98 |
2 | 0 | 10 | 10.3 | 5.35 |
3 | 5 | 2 | 2.93 | 2.09 |
4 | 5 | 10 | 2.41 | 1.86 |
5 | 20 | 2 | 1.80 | 0.90 |
6 | 20 | 10 | 2.00 | 0.86 |