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. 2015 Nov 20;6:8969. doi: 10.1038/ncomms9969

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(a,b) Transmission spectra (normalized to the substrate transmission) of the C-SRR-GR hybrid metamaterial devices HM2 (a) and HM3 (b) at different back-gate voltages (graphene carrier densities) in comparison with the transmission spectrum of the corresponding reference bare C-SRR array. The inset in each graph shows a SEM image of a device unit cell. Scale bars, 5 μm. The vertical grey dashed lines indicate the frequency of the THz quantum cascade laser used in the modulation speed measurement. (c) Schematic representation of the parallel electrical contact for all the C-SRR-GR unit cells. (d) Symbols are the normalized modulation depth of two hybrid metamaterial devices, HM2 (top) and HM3 (bottom), as a function of modulation frequency. Solid curves are the fits of the measured data based on a standard RC circuit model.