Table 3.
Source | Type 3 SS | df | MS | F | Significance |
---|---|---|---|---|---|
ECC Config | 2,121.585 | 3 | 707.195 | 47.893 | < 0.001 |
ET | 10,366.784 | 9 | 1,151.865 | 78.007 | < 0.001 |
GME size | 7,619.075 | 9 | 846.564 | 57.331 | < 0.001 |
ECC*ET | 7,745.928 | 27 | 286.886 | 19.429 | < 0.001 |
ECC*size | 6,240.903 | 27 | 231.145 | 15.654 | < 0.001 |
ET*size | 26,911.295 | 81 | 332.238 | 22.500 | < 0.001 |
ECC*ET*size | 21,610.210 | 243 | 88.931 | 6.023 | < 0.001 |
Error | 29,532.500 | 2000 | 14.766 | ||
Total | 112,148.280 | 2399 |
Note: ECC Config, ECC configuration; ET, elapsed time; GME Size, micron limits; ECC*ET, ECC*Size, ET*Size, and ECC*ET*Size, the interactions between factors.