Figure 2. The controlled change in V- and Λ-shaped NED actuator curvature.

The change in cantilever curvature as a function of the elementary actuator roof angle α. Results are given for the calculation by the analytical model (red line), presented in the Supplementary Information, and for the simulation using electrostatic mechanical coupled-field FEA (black dots). The electrostatic control voltage V of 10 V was applied across an air gap t_g of 100 nm (ɛ_r=1), with elementary actuator cell length of 6 μm (l_b=2.5 μm and l_s=0.5 μm), a top electrode thickness t_e of 200 nm and a cantilever thickness t_b of 6 μm. The top electrodes and cantilever are assumed to be made of silicon with a modulus of elasticity E of 169 GPa. The spacers were assumed to be made of alumina with a modulus of elasticity E of 266 GPa.