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. 2015 Dec 11;6:10078. doi: 10.1038/ncomms10078

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The strain energy as a function of the roof angle, normalized using the bending stiffness of flat roof shaped structure (α=0) as a reference. All FEA simulations were done for the following set of parameters: t_g=100 nm, t_b=6 μm, t_e=200 nm, l_b=2.5 μm, l_s=0.5 μm, E=169 GPa (electrodes), E=266 GPa (spacer), V=10 V and ɛ_r=1.