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. 2015 Dec 11;6:10078. doi: 10.1038/ncomms10078

Figure 4. Finally released V-like and Λ-like NED actuators.

Figure 4

(a) Microscope image (top view) of a released sample of V-like NED actuator at its free end, middle and clamping position (from left to right, scale bar, 50 μm). (b) Microscope image (top view) of a released sample of Λ-like NED actuator at its free end and clamping position (left and right, scale bar, 50 μm). (c) Scanning electron micrograph of a cross-section of a V-like NED actuator sample cut with a focused ion beam at the middle of the cantilever (scale bar, 2 μm). (d) Scanning electron micrograph of a cross-section of a Λ-like NED actuator sample cut with a focused ion beam at the middle of the cantilever (scale bar, 2 μm). Additional microscopy images are given in Supplementary Figs 8 and 9 to provide a more detailed understanding of the fabricated NED actuators.