SEM images of two fibrils at the locations of tensile fracture (scale bars represent 1 µm in a,b and 200 nm in c,d). (a) In this particular fibril, tensile fracture occurs in the middle of the strain gauge region. (b) In this particular fibril, tensile fracture occurs close to the surface of the MEMS device. (c) A higher magnification image of the fibril in the box in (a). (d) A higher magnification image of the fibril in the box in (b). (e) In both fibrils, fracture occurs at angles of about 45° to the axial direction of the fibrils. (f) In both fibrils, one of the fracture edges appears to be sharp, while the other edge appears to be blunt and irregularly shaped. (Online version in colour.)