Fig. 3. Comparison of three different types of metasurfaces, showing different sensitivities to the subperiodicity (that is, the distance between neighboring cells).

For ease of comparison, in these simulations, the same parameters were used for all the three types of metasurfaces. (A to C) Dependence of the conversion efficiency on the subperiodicities for three types of metasurfaces as the subperiodicities increase from 150 to 180 nm. (D to F) Dependence of the extinction ratio on the subperiodicities for three types of metasurfaces as the subperiodicities increase from 150 to 180 nm.