TABLE II.

Reported photon fluxes for single-grating HHG monochromators. a.m. and a.f. refer to the position of flux measurement, i.e., measured after monochromatization and after a focusing element, respectively.

	Laser frequency (kHz)	Energy (eV)	Flux (photon/s)
Ref. 20 [a.f.]	1	23.6	$1·{10}^{10}$
Ref. 21 [a.f.]	10	35.6	$3.6·{10}^7$
Ref. 22 [a.m.]	4000	20	$2·{10}^3$
Ref. 23 [a.m.]	5	35	$5.5·{10}^{11}$
	5	79	$2.8·{10}^9$
Ref. 25 [a.m.]	1	32.5	$1.6·{10}^{10}$
This work [a.f.]	6	36.3	$2.3·{10}^{11}$
	3	102	$1.5·{10}^8$