| U11 | U22 | U33 | U12 | U13 | U23 | |
| Ge1 | 0.01210 (7) | 0.01250 (7) | 0.01693 (7) | −0.00005 (6) | 0.00481 (5) | −0.00168 (6) |
| Si1 | 0.01585 (18) | 0.01453 (18) | 0.01666 (18) | 0.00156 (14) | 0.00463 (14) | −0.00171 (14) |
| C1 | 0.0175 (6) | 0.0189 (7) | 0.0196 (7) | 0.0025 (5) | 0.0021 (5) | −0.0043 (5) |
| C2 | 0.0260 (8) | 0.0266 (8) | 0.0293 (8) | −0.0083 (7) | 0.0042 (7) | −0.0038 (7) |
| C3 | 0.0249 (8) | 0.0306 (9) | 0.0245 (8) | 0.0037 (7) | −0.0025 (6) | −0.0045 (7) |
| C4 | 0.0281 (8) | 0.0279 (8) | 0.0297 (9) | 0.0060 (7) | 0.0044 (7) | −0.0127 (7) |
| C5 | 0.0269 (8) | 0.0245 (8) | 0.0309 (9) | 0.0112 (7) | 0.0013 (7) | −0.0060 (7) |
| C6 | 0.0410 (10) | 0.0391 (10) | 0.0243 (8) | −0.0134 (8) | 0.0132 (7) | −0.0001 (7) |
| C7 | 0.0152 (6) | 0.0170 (6) | 0.0161 (6) | −0.0019 (5) | 0.0050 (5) | −0.0015 (5) |
| C8 | 0.0198 (7) | 0.0182 (7) | 0.0322 (8) | −0.0008 (6) | 0.0024 (6) | −0.0008 (6) |
| C9 | 0.0291 (8) | 0.0182 (7) | 0.0356 (9) | −0.0064 (6) | 0.0039 (7) | −0.0003 (7) |
| C10 | 0.0231 (7) | 0.0305 (8) | 0.0225 (7) | −0.0123 (6) | 0.0040 (6) | −0.0018 (6) |
| C11 | 0.0148 (6) | 0.0328 (8) | 0.0178 (7) | −0.0026 (6) | 0.0021 (5) | 0.0009 (6) |
| C12 | 0.0176 (7) | 0.0208 (7) | 0.0168 (6) | −0.0004 (5) | 0.0044 (5) | 0.0014 (5) |
| C13 | 0.0151 (6) | 0.0158 (6) | 0.0167 (6) | 0.0016 (5) | 0.0044 (5) | −0.0001 (5) |
| C14 | 0.0220 (7) | 0.0226 (7) | 0.0199 (7) | −0.0051 (6) | 0.0082 (6) | −0.0044 (6) |
| C15 | 0.0220 (7) | 0.0318 (9) | 0.0251 (8) | −0.0066 (6) | 0.0108 (6) | −0.0023 (6) |
| C16 | 0.0249 (8) | 0.0334 (9) | 0.0206 (7) | 0.0041 (7) | 0.0117 (6) | −0.0005 (6) |
| C17 | 0.0277 (8) | 0.0277 (8) | 0.0200 (7) | 0.0009 (6) | 0.0069 (6) | −0.0073 (6) |
| C18 | 0.0189 (7) | 0.0209 (7) | 0.0209 (7) | −0.0017 (6) | 0.0051 (6) | −0.0037 (6) |
| C19 | 0.0135 (6) | 0.0123 (6) | 0.0189 (6) | −0.0003 (5) | 0.0034 (5) | −0.0023 (5) |
| C20 | 0.0184 (7) | 0.0187 (7) | 0.0215 (7) | 0.0019 (5) | 0.0073 (5) | 0.0006 (6) |
| C21 | 0.0216 (7) | 0.0216 (7) | 0.0290 (8) | 0.0051 (6) | 0.0083 (6) | −0.0045 (6) |
| C22 | 0.0256 (8) | 0.0124 (6) | 0.0327 (8) | 0.0033 (6) | 0.0010 (6) | −0.0025 (6) |
| C23 | 0.0306 (8) | 0.0173 (7) | 0.0239 (8) | −0.0016 (6) | 0.0038 (6) | 0.0047 (6) |
| C24 | 0.0201 (7) | 0.0183 (7) | 0.0201 (7) | −0.0017 (6) | 0.0060 (5) | −0.0009 (6) |
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