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Two-axis ISC MEMS mirror. (a) Device design: there are four ISC actuators whose A ends are anchored on the substrate and B ends connect to the central mirror plate; (b) SEM of a fabricated device: the initial elevation of the mirror plate is 240 μm, the mirror plate is 1.0 mm × 1.0 mm, and the whole device size is 1.5 mm × 1.5 mm.
