FIG. 2.

(a) FEM simulation of a tensile-stressed beam with stress-tuning slits at the ends. (b) Displacement at beam center with respect to slit depth. FEM results (line) are for a beam with the same dimensions as the optical beam of the slot-mode device. Error bars on the measured data are due to the uncertainty in the SEM measurements and are one standard deviation values. (c) Scanning electron microscope (SEM) images of a released device. Insets show the slot width at the beam end is about 70 nm, shrinking to 24 nm at the beam center.