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. Author manuscript; available in PMC: 2016 Jan 22.
Published in final edited form as: Optica. 2015;2(11):994–1001. doi: 10.1364/OPTICA.2.000994

FIG. 7.

FIG. 7

(a) FEM simulation of the optical mode of an M-O-M device designed for coupling to 3.4 GHz band (bottom beam) and 1.8 GHz band (top beam) mechanical breathing modes. The optical mode is in both slots simultaneously. (b) SEM image of a fabricated M-O-M device. (c) Optical spectrum of M-O-M device. Measurement is in gray, and the Lorentzian fit is in red Measured intrinsic Qo = (1.26 ± 0.02) × 105 (d) Both mechanical modes measured simultaneously, FTW input power ≈ 3 mW. Data are in gray and Lorentzian fits are in red. At this optical input power, the 1.93 GHz mode has effective Qm = 3175 ± 2, and the 3.484 GHz mode has effective Qm = 3350 ± 10, where uncertainty comes from 95 % confidence interval of fit. (insets) FEM eigenmode simulations of corresponding mechanical breathing modes.